SiC Focus Ring is consumable parts for etching and epitaxial process during Si Semiconductor and SiC Power Semiconductor making process. The product is mainly applicable to memory semiconductor and power semiconductor area. The product enables plasma generated from etch products to be focused on the wafer for better uniformity and accuracy during the etching process.
CVD coated SiC parts prevent gas leakage or separation and scattering of graphite particles.
Benefits of using CVD coated SiC Parts
• High purity
• Excellent oxidation resistance
• Excellent chemical resistance
• Stable at high temperatures
Tantalum is a kind of rare metal. It is used in the semiconductor and medical industries.CVD SiC bulk products improve life time and yield of parts used in semiconductor manufacturing process.
Benefits of using CVD SiC Bulk productcs
• Excellent corrosion resistance
• Longer life time than Si product
• No off-gas released
• Withstand high temperature showing almost no change of properties